|
週次 |
日期 |
單元主題 |
|
Week 1 |
02/21 |
Course info., Introduction |
|
Week 2 |
02/28 |
(no class) |
|
Week 3 |
03/06 |
Nano-CMOS Devices, Processes, Variability |
|
Week 4 |
03/13 |
Lithography: Equipment, Process, and Trends |
|
Week 5 |
03/20 |
Lithography: Modeling |
|
Week 6 |
03/27 |
Lithography: RET (OPC, PSM, DP) |
|
Week 7 |
04/03 |
Lithography Friendly Design/P&R/hot spot/LRC |
|
Week 8 |
04/10 |
CMP/dummy fill/P&R |
|
Week 9 |
04/17 |
Interconnect (extraction, electrical, Diode insertion) |
|
Week 10 |
04/24 |
Random defects/CAA |
|
Week 11 |
05/01 |
Device modeling/Leakage and Low Power Design |
|
Week 12 |
05/08 |
SSTA I: Variability modeling, Test structures |
|
Week 13 |
05/15 |
SSTA II: Yield prediction, Yield Optimization |
|
Week 14 |
05/22 |
Circuit design examples (mixed signal, IO, memory) |
|
Week 15 |
05/29 |
Summary and Review |
|
Week 16 |
06/05 |
Final Exam |
|
Week 17 |
06/12 |
Final project report/presentation 1st version due |
|
Week 18 |
06/20 |
Final project report/presentation final version due |